PVD 최종 발표

목차

1. Introduction
2. Resistive heating
3. Electron-bombardment heating
4. Application
5. Reference

본문내용

Resistive evaporation

- One of the simplest processes of vacuum deposition

- Materials such as iron, nickel, aluminum, copper, tin, silver, gold and platinum are frequently deposited using thermal evaporation methods.

- Resistive evaporation is used in various applications ranging from decorative coating to semiconductor manufacturing processes.

- typically 3.0 x 10-4 Torr or lower.

참고 자료

http://files.aiscience.org/journal/article/html/70280023.html
http://angstromengineering.com/tech/resistive-thermal-evaporation/
https://m.blog.naver.com/PostView.nhn?blogId=nnfcblog&logNo=60213407392&proxyReferer=https%3A%2F%2Fwww.google.co.kr%2F
https://www.google.co.kr/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&ved=0ahUKEwiXjMbcm_DXAhURhrwKHePZAFAQjhwIBQ&url=http%3A%2F%2Fwww.torr.com%2Fe-beam-evaporation-ion-assisted-system&psig=AOvVaw1u4RwjGaSSJIA99B-JPaP6&ust=1512465176953699
https://www.google.co.kr/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&ved=0ahUKEwidkKmwm_DXAhUKNbwKHWuXBsoQjhwIBQ&url=http%3A%2F%2Flasallescientific.com%2Fadnano-tech-uhv-e-beam-evaporator%2F&psig=AOvVaw1u4RwjGaSSJIA99B-JPaP6&ust=1512465176953699