유한요소 해석을 이용한 초음파원자현미경 캔틸레버의 접촉 공진주파수 특성 분석 (Analysis of Contact Resonance Frequency Characteristics for Cantilever of Ultrasonic-AFM Using Finite Element Method)

서지정보

· 발행기관 : 한국생산제조학회
· 수록지 정보 : 한국생산제조학회지 / 23권 / 5호 / 478 ~ 484페이지
· 저자명 : 이주민, 한유하, 곽동열, 박익근

초록

Ultrasonic atomic force microscopy(Ultrasonic-AFM) can be used to obtain images of the elastic properties of a subsurface and to evaluate the elastic properties by measuring the contact resonance frequency. When a tip is in contact with the sample, it is necessary to understand the cantilever behavior and the tip-sample interaction for the quantitative and reliable analysis. Therefore, precise analysis models that can accurately simulate the tip-sample contact arerequired; these can serve as good references for predicting the contact resonance frequency. In this study, modal analyses of the first four modes were performed to calculate the contact resonance frequency by using a spring model, and the deformed shapes of the cantilever were visualized at each mode. We presented the contact characteristics of the cantilever with a variety of contact conditions by applying the contact area, contact material thickness, and material properties as the parameters for the FEM analysis.

영어초록

Ultrasonic atomic force microscopy(Ultrasonic-AFM) can be used to obtain images of the elastic properties of a subsurface and to evaluate the elastic properties by measuring the contact resonance frequency. When a tip is in contact with the sample, it is necessary to understand the cantilever behavior and the tip-sample interaction for the quantitative and reliable analysis. Therefore, precise analysis models that can accurately simulate the tip-sample contact arerequired; these can serve as good references for predicting the contact resonance frequency. In this study, modal analyses of the first four modes were performed to calculate the contact resonance frequency by using a spring model, and the deformed shapes of the cantilever were visualized at each mode. We presented the contact characteristics of the cantilever with a variety of contact conditions by applying the contact area, contact material thickness, and material properties as the parameters for the FEM analysis.

참고자료

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