나노 스테이지와 볼나사 스테이지에서 커패시티브 센서 실험에 관한 연구

서지정보

· 발행기관 : 한국기계기술학회
· 수록지 정보 : 한국기계기술학회지 / 20권 / 1호
· 저자명 : 차영엽

목차

1. 서 론
2. 용량 센서와 특성
3. 나노 스테이지 실험
4. 볼나사 스테이지 실험
5. 결 론
후 기
References

영어초록

The capacitive sensors can be divided into two categories depending on their performance and intended use. First, high resolution sensors are commonly used in displacement and position monitoring applications where high precision, high stability, and low temperature drift are required. Often these sensors are used in process monitoring and closed loop feedback control systems. Second, proximity capacitive sensors are much cheaper and generally used for sensing the presence of parts or for counting applications. The following paper describes characteristics of capacitive sensor and application to the PZT nano and ball screw stage.

참고자료

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