Surface Morphology, Microstructure and Mechanical Properties of Thin Ag Films

서지정보

· 발행기관 : 한국분말야금학회
· 수록지 정보 : 한국분말야금학회지 / 10권 / 3호
· 저자명 : Shugurov Artur, Panin Alexey, Chun Hui-Gon, Oskomov Konstantin

영어초록

Thin Ag films deposited onto substrates by DC magnetron sputtering and thereafter annealed ,it temperatures 100-50 are investigated by scanning tunneling and atomic forte microscopy. It is shown that the film surface topography and microstructure are considerably changed as a result of annealing. To provide a quantitative estimation of the surface topography changes of Ag films the surface fractal dimension was calculated. Elasticity and hardness of the films are studied by a nanoindentation technique. The films are found to have value of elastic modulus close to that of bulk silver while their hardness and yield stress are essentially higher.

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